- Inergy Technology, Inc. v. Force Mos Technology Co., Ltd.Some claims unpatentablePTAB · May 16, 2025 · IPR2024-00094 · APJ Mary C Hoffman · IPR · Final written decision
Claims 1 and 3–5 are unpatentable over Kobayashi and Hshieh; claims 2 and 6 were not shown unpatentable over the asserted combinations.
RulingsFinal written decision- Skill levelSkill level petitioner adoptedDecided for petitioner
“Petitioner asserts that a person of ordinary skill in the art (“POSITA”), “at the filing date of the ’409 [p]atent[,] would have a master’s degree in electrical engineering, and at least two years of relevant work experience in the field of integrated circuit design and manufacturing.” Pet. 13 (citing Ex. 1003 ¶ 52). Patent Owner does not dispute Petitioner’s proffered level of ordinary skill in the art. PO Resp. 9 (citing Ex. 2021 ¶ 55). We adopt Petitioner’s proffered level of ordinary skill in the art, which is supported by unopposed declaration testimony and consistent with the ’409 patent and prior art of record. See, e.g., Ex. 1001, 1:6–3:8 (describing the invention and related art in terms of integrated circuit design and fabrication). Neither party, moreover, indicates the overall result would change based on a different definition.” slip op. at 10
- Claim Construction › Intrinsic evidence (Phillips canons) › Plain and ordinary meaning to a POSITAPlain and ordinary meaningDecided for patent owner
“Based on the arguments and evidence, we disagree with Petitioner’s proposed construction requiring the corners to be rounded via a particular process, because doing so would improperly import a process of manufacture from the Specification into apparatus claims. See Cont’l Circuits LLC v. Intel Corp., 915 F.3d 788, 799 (Fed. Cir. 2019) (explaining that, generally, a novel product that meets the criteria of patentability is not limited to the process by which it was made, however, process steps can be treated as part of a product claim if the patentee has made clear that the process steps are an essential part of the claimed invention). Here, the portions of the Specification relied on by Petitioner (Ex. 1001, 2:10–20, 4:53–64) disclose a process for manufacturing but do not make clear that the process is an essential part of the claimed invention. We also disagree with Petitioner’s assessment of the prosecution history, i.e., that the claims were amended to distinguish the claimed rounded corners from Pfirsch’s rounded corners, which, presumably, are formed as an incidental result of lithography. On the contrary, the Examiner found (and Patent Owner acknowledged) that Pfirsch has rounded corners. Ex. 1002, 276, 295, 302. As Patent Owner correctly points out, the claims were amended during prosecution to include a “circular” contact to distinguish over Pfirsch’s square contact. See id. Petitioner does not otherwise point to evidence that Patent Owner clearly and unmistakably limited the claim scope to rounded corners formed by a particular process.” slip op. at 12
- Obviousness (§103) › Motivation to combine / reasonable expectation of successMotivation foundReasonable expectation foundUnpatentable
“is ‘known’ is not sufficient for a motivation to combine.” PO Resp. 47. However, the motivation-to-combine analysis is a flexible one, and the “known-technique” rationale is adequate to show a motivation to combine. For example, “if a technique has been used to improve one device, and a person of ordinary skill in the art would recognize that it would improve similar devices in the same way, using the technique is obvious unless its actual application is beyond his or her skill.” KSR, 550 U.S. at 417; see also Intel Corp. v. PACT XPP Schweiz AG, 61 F.4th 1373, 1380 (Fed. Cir. 2023) (quoting Intel Corp. v. Qualcomm Inc., 21 F.4th 784, 799–800 (Fed. Cir. 2021) (“If there’s a known technique to address a known problem using ‘prior art elements according to their established functions,’ then there is a motivation to combine.”). Here, as discussed above, the record shows that top view rounding was a known technique to eliminate corners, and that corners were a known problem (e.g., corners tend to reach undesirable higher peak electric field leading to premature breakdown voltage). See, e.g., Ex. 1003 ¶¶ 37, 39, 42– 44, 55–57, 122, 133, 135–141; Ex. 1005, 7:57–8:4; Ex. 1006, 1:18–21, 2:19–39, 5:3–17, Figs. 6A–8B; Ex. 1011, 1:29–41; Ex. 1012; PO Resp. 13, 46 (citing Ex. 1011, 1:34–40); Ex. 2021 ¶ 87. Furthermore, there is no dispute that modifying Kobayashi to eliminate corners via top view rounding was anything more than a “minor and commonplace modification” of cell shape within the skill of an ordinary artisan, or that top view rounding would change Kobayashi’s established function. Pet. 60; Ex. 2021 ¶ 86.” slip op. at 30
- Obviousness (§103) › KSR rationalesMotivation foundUnpatentable
“We agree that Kobayashi’ s Figure 5A solely cannot be relied upon as disclosing the claimed diameter. See Hockerson-Halbertstadt, Inc. v. Avia Group Int'l, 222 F.3d 951, 956 (Fed. Cir. 2000) (patent drawings not designated as being drawn to scale cannot be relied upon to define precise proportions of elements if the specification is completely silent on the issue). However, we do not agree that Petitioner failed to show Kobayashi suggests the recited diameter. We disagree with Patent Owner’s assertion that Dr. Liu’s “vague, purported ‘design considerations’” are “unsupported.” PO Resp. 43. Although Kobayashi is silent on the width/diameter of the trench contact in Figure 5A, Kobayashi discloses trenched gates having dimensions below 0.5 μm, which demonstrates that it was known in the art, and required no more than an exercise of ordinary skill in the art, to create trenched features of widths well below 1 μm. Kobayashi also discloses that the width of each trench, and the distance between the adjacent trenches (which includes the trench contact), must be selected to optimum sizes . . . [and] these sizes . . . have some degrees of freedom.” Ex. 1005, 7:42–48. This demonstrates a POSITA would seek to optimize trench contact width or diameter. Dr. Liu’s testimony regarding design considerations suggests the desirability of a reduced diameter trench contact, e.g., to minimize the width of the trench contact for purposes of easier filling, to minimize the total width of the unit cell, and to minimize manufacturing time by reducing etch back time. See Ex. 1003 ¶¶ 111–114. As Patent Owner acknowledges, “there is always a motivation to speed up the fabrication process or shrink feature sizes of semiconductors.” PO Resp. 43 (citing 2021 ¶ 131). However, contrary to Patent Owner’s arguments, these are not generic motivations “untethered” from Kobayashi. Id. Indeed, Kobayashi directly addresses the fabrication process (including new techniques to obtain trench widths under 0.5 μm) and the need to optimize the size of trench gates and the space in between (which includes the trench contact). Ex. 1005, 7:43–54, 7:19–9:53. Patent Owner also argues that Petitioner presents no evidence that modifying Kobayashi to have a diameter smaller than 1 μm is predictable. PO Resp. 44. We disagree. As discussed above, Petitioner points to Kobayashi’s teachings that the sizes are to be optimized and that the trench gate width is smaller than 0.5 μm, which suggests making other trench features of that width was within ordinary skill. Ex. 1003 ¶ 112. Furthermore, Kobayashi’s silence as to the dimensions of the trench contact suggests that the trench contact diameter dimension is likely in the ballpark of the other explicitly disclosed trenched feature dimensions and is a matter of routine optimization. In addition, Patent Owner advances no persuasive evidence that the claimed diameter produces unexpected results or is otherwise critical. Patent Owner also argues that reducing trench contact diameter has downsides (i.e., reduced ease of filling for metal plugs and reduced current carrying capacity) not addressed by Petitioner; however, Petitioner is not required to address those tradeoffs in its Petition, and we do not see how those tradeoffs would prevent the proposed combination. PO Resp. 44; see Medichem, S.A. v. Rolabo, S.L., 437 F.3d 1157, 1165 (Fed. Cir. 2006) (“a given course of action often has simultaneous advantages and disadvantages, and this does not necessarily obviate motivation to combine.”); Winner Int'l Royalty Corp. v. Wang, 202 F.3d 1340, 1349 n.8 (Fed. Cir. 2000) (“The fact that the motivating benefit comes at the expense of another benefit, however, should not nullify its use as a basis to modify the disclosure of one reference with the teachings of another. Instead, the benefits, both lost and gained, should be weighed against one another.”). Here, Dr. Liu listed numerous benefits of having a reduced diameter, which weigh against the potential downsides raised by Patent Owner. Ex. 1003 ¶¶ 111–114. Moreover, we do not see how the downsides/tradeoffs prevent modifying Kobayashi in the manner suggested when the same tradeoffs appear to be applicable to the ’409 patent. Having considered Patent Owner’s arguments, and taking into” slip op. at 43
Patent outcomesUS 7,812,409 mixedClaim construction§ 103 obviousnesscites Phillips · KSR · GrahamPatents in suitUS 7,812,409
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